TSI Incorporated
Demonstrate Process Control With Industry Leading Particle Counters

Ultra-clean semiconductor environments must demonstrate in-control processes, relying on particle counters to accurately report particle excursions that affect product yield. Only then can cleanroom personnel make informed decisions on how to improve processes, reduce risk, and pass audits while maximizing yield.

“State-of-the-art semiconductor labs often see particle counters report zero particles ≥100 nm, so they are baffled when product yields decline,” mentions Mr. Ketan Mehta, the Vice President of Product Management and Marketing at TSI Incorporated. “As we frequently explain to customers, if your particle counters are reporting zeroes, they are not providing useful information and potentially missing nanoparticles that may be a source of contamination. In other words, how can they be certain their particle counter is even working?”

To this end, by valuing customer collaboration, TSI sets limits for particle excursions and the actions that must take place when a limit is exceeded. By enabling particle events to be easily recognized, the company allows users to quickly correlate events, identify the particle source, and reduce costly risk to the product.

TSI does this by calibrating instruments to the highest level of accuracy using scientific nanoparticle analysis tools that are widely acknowledged as the gold standard.

TSI has been doing particle counting for a long time since 1961 being recognized in the industry for providing accurate, repeatable particle counters to monitor ultra-clean manufacturing environments. No other suppliers in the industry rival its expert industry knowledge that drives the innovation to deliver unmatched instrument capabilities the market demands. Every day, TSI challenges itself to understand customer problems and offer accurate, reliable, and low-cost of ownership instruments that ensure customer success.

TSI offers the only water-based, high flow rate nanoparticle counter on the market the AeroTrak^® 9001 Cleanroom Condensation Particle Counter that reports contamination ≥10 nm. The Model 9001 provides a magnitude greater sensitivity than traditional 0.1 µm particle counters that allow users to see particle events affecting their yields. TSI, with this instrument, enables customers to reduce risk and make process improvement decisions based on real data and not zero counts. The company can detect all size airborne particles from 10 nm to 25 microns to monitor the entire range of contaminants that can affect semiconductor processes. TSI instruments are backed by industry-best warranties and offer a lower cost of ownership, the ability to detect nanoparticles in high-pressure gases, and the option to communicate wirelessly for remote monitoring.

As an industry leader in the design and production of precision measurement instruments, TSI partners with research institutions and customers around the world to set the standard for measurements relating to aerosol science, airflow, indoor air quality, fluid dynamics, and biohazard detection. With headquarters based in the U.S. and field offices throughout Europe and Asia, TSI has established a worldwide presence in the markets they serve.

“Our customers count on us to improve their processes and reduce product risk to minimize supply chain demands for today, and into the future,” says Mr. Mehta.