Tricorntech
Ensuring Yield Enhancement in Semiconductor Production

Wafer yield enhancement has long been the Holy Grail for chip manufacturers. It requires adherence to a host of air quality standards when designing and operating fabrication (fab) facilities. Micro-Contamination control has become integral as semiconductor feature sizes shrink. A speck of impurity in fabs can impact the wafer yield and reliability (lifetime before failure).

Recent studies show that airborne molecular contaminants (AMC) and particularly volatile organic compounds (VOC) owing their origin to many internal and external sources can either directly or indirectly cause wafer defects. This prompts chip manufacturers to focus on real-time AMC and VOC monitoring, a much-needed preventive maintenance measure required to optimize yield.

A specialist in manufacturing auto field-gas chromatography (GC) VOC analyzer, Tricorntech is best equipped to answer this clarion call for enhancing precision monitoring of VOC and AMC in fabs. Its flagship product, Miniaturized Total Analysis Platform (MiTAP), offers a complete VOC monitoring experience, supplementing clients’ preventative measures of AMC contamination management

The MiTAP product suite comprises a portfolio of AMC analyzers; MiTAP AMC series, MiTAP S500 series, MiTAP SFT series, MiTAP cart system, and MiTAP Manifold system. Each type of equipment is designed to meet the requirements of different applications, including cleanroom environment, exhaust system monitoring, mini-environment/FOUP cleanliness, and processing tool/FI environment control.

From Lab to Fab

MiTAP presents an excellent alternative to conventional AMC monitoring systems that perform each task separately and lack of spatial-temporal resolution, from monitoring to analysis.

Fab users typically had to take the canister or sorbent tube to grab samples for laboratory instrument analysis, retrieve the data offline, and enlist a team of experts for data analysis. The cost of ownership of such lab-scale instrument is usually considerable that makes it challenging and inappropriate to operate in a continuous fashion.

To the other extreme of AMC monitoring, low-cost sensors (e.g., handheld PID sensor) are commonly adopted by Safety related units. However, the generated reports accounted for only total VOC (TVOC), not speciated ones, whose application is limited for massive outgassing events. For AMC contamination control that is related to wafer yield, the visibility of gas species is as influential as the chemicals need controlled are process-dependent and highly interactive. The chemical interactions might give rise to unwelcomed chemicals causing defects at later processing steps -Butterfly Effect.

Tricorntech’s AMC solution is built with experiences to serve this unmet application demand. Designed as a miniature and modular solution, MiTAP outpaces conventional instruments in all aspects. It houses a front-end micro-sampling unit, a multi-dimensional-GC module, a selective detector array, and a data processing unit, providing the ability to measure speciated VOCs at sub-ppb detection level.

The solution performs automatic analysis according to schedule while allowing customization to detect various sets of specific VOC. The expandable design facilitates integration with multiple sensors, making the product ideal for multi-point online AMC monitoring at cleanroom environment in large foundries.

MiTAP’s smaller form factor, automation, portability, and built-in calibration on targeted VOC also position it as the perfect choice for mini-environment/FOUP AMC monitoring. It gathers all relevant data from FOUP or processing tool environments and works cohesively with fault detection and control (FDC) systems. The MiTAP can precisely identify the gases in question regardless of the application environment or concentration level. It is a real game changer for a range of other application areas, such as MAU filtration efficiency monitoring, VOC baseline management and preventive warning system, and endpoint cross-contamination verification.

MiTAP can also monitor non-classified hydrocarbons, such as IPA and Acetone listed in ITRS guidelines. IPA and other non-classified hydrocarbons are difficult to measure and are often unintentionally ignored. MiTAP’s patented design—the combination of micro-GC and detector array—enables monitoring of IPA with a detection limit (<0.1ppbv) low enough to make it a viable option for fabs.

“Our MiTAP suite is a portable laboratory that operates automatically, offering continuous real-time AMC monitoring on-site,” says Li-Peng Wang (Leo Wang), CEO of Tricorntech. “Even non-professional laboratory researchers can easily operate it and obtain highly accurate results, without being tied down by traditional testing constraints.”

Adhering to Stringent QC Measures

Equipped with a built-in calibration device, Automatic Calibration System (ACS), MiTAP is able to perform onsite quality check on regular basis without human intervention. The live data are often uploaded to clients’ central data collection platform or website in a timely manner, enabling a justifiable sense of data custody and confidentiality.

Impressed by the equipment's efficacy, Micron Technology as well as TSMC (Taiwan Semiconductor Manufacturing Company) have both added MiTAP to their Tool of Reference list (TOR) and awarded Tricorntech for product excellence.

Time-tested Solution

In a recent collaboration, a client working predominately with offline monitoring methods had various error-prone manual procedures and was not able to accurately pinpoint VOC contamination that contributed to defects like lens haze. The presence of VOC negatively impacted wafer production yield. While wafers might be contaminated at the initial processing step, defects could only be observed in the later stages.

Tricorntech offered an online VOC monitoring solution to track and manage the overall VOC baseline levels at each processing area. The product simplified continuous VOC monitoring in the fab while giving accurate spatial data. It allowed the client to successfully pinpoint potential VOC contamination that led to defects. MiTAP identified "PGMEA," in this case, which interacted with H2O and formed acetic acid, causing hazes on the lens.

Scripting similar success stories, Tricorntech has been recognized by many key players in the semiconductor industry. They all use MiTAP as their tool of reference (TOR) for inline monitoring in their fabs. The product also has gained prominence among foundries across Singapore, China, and U.S.

Ambient Air Monitoring

Tricorntech’s promising technology and data quality have made it the most trusted name in not only the world of semiconductor but the public environment.

Tricorntech’s MiTAP is widely used for environmental applications. U.S. Environmental Protection Agency (US EPA) uses the equipment for the monitoring of fugitive emissions in industrial areas. MiTAP is also listed in the Community Air Monitoring Plan (CAMP) issued by South Coast Air Quality Management District (SCAQMD) for continuous VOC monitoring at refinery-related communities.

Based on client requirements, Tricorntech offers customization to establish on-site, real-time continuous air evaluation. It takes attributes like manufacturing processes and factory location into account and correlates the results against wind speed and direction. These insights are instrumental in mapping the pollution picture of the entire factory area and helping clients build a comprehensive perimeter protection unit. When there is an emergency large-scale escape event or a small but continuous abnormal leak, clients can grasp the gas emission status in real-time and make informed decision-making regarding the best immediate protection.

MiTAP, to this end, is designed to facilitate fence-line monitoring around industrial facilities to support the efforts of emission reduction. Furthermore, MiTAP is also appointed as regulatory instrument for “air toxics” monitoring at communities for the purpose of supporting environmental agencies in protecting human health and contributing to the environmental justice.

Innovative Drive

Going forward, Tricorntech aims to further enhance the capabilities of its product portfolio. It is also part of a consortium established by TSMC to facilitate digital transformations and help Taiwan-based foundries retain a competitive edge in global markets. It practices a collaborative business model to build solutions that will help the semiconductor industry devise better remedial measures to counter AMC and VOC impacts. The company is also continuously working with U.S. EPA to expand monitoring capabilities for wider range of air pollutants. These initiatives illustrate how Tricorntech is on track to create upsides for online real-time AMC/VOC monitoring as well as retrospect evaluation.