SONOSYS
Elevating Semiconductor Cleaning with 9 Megahertz Nozzle and Digital Controller

As semiconductor manufacturers strive to create smaller, more powerful chips, the need for advanced cleaning solutions has intensified. Meeting the stringent requirements necessitates innovative technologies that can remove minuscule particles without damaging delicate patterns, ensuring the highest levels of product quality and reliability.

SONOSYS, specializing in ultrasonic and Megasonic cleaning platforms for over two decades is pushing the envelope even further. It has introduced a nine-megahertz nozzle and a cutting-edge digital controller—solutions specifically designed to address the unique challenges faced by today’s semiconductor fabs.

Founded in 1995 in Neuenbürg, Germany, SONOSYS designs and develops innovative cleaning technologies that meet the exacting standards of the industry’s leading players. Its high-frequency Megasonic products, operating between the 400 kHz and 9 MHz range, are trusted by major players in the semiconductor, MEMS, and optical industries to ensure the integrity and quality of their production processes.

Customer-Centric Philosophy

“Delivering the right-fitting key to the door lock” has been SONOSYS’ mantra from the beginning. This philosophy drives the company to develop solutions by understanding and addressing each customer’s unique needs.

“In our world, besides many basic things like chemical resistance or regulatory compliance, the major pain points are usually removing the smallest particles from substrates in a damage-free way,” explains Ralf Emberger, CEO of SONOSYS.

With leading fabs like Samsung and TSMC pushing towards smaller node sizes, from 5 nanometers down to 2 and even 1 nanometer, the pressure to achieve damage-free cleaning of the most delicate patterns has never been higher. Contaminants at these scales can lead to costly failures, making reliable cleaning technology a critical part of production.

SONOSYS has developed its new nine megahertz nozzle to address these challenges, offering higher frequency cleaning and greater control over delicate surfaces. The new nozzle system significantly reduces pattern damage, making it ideal for customers with the most advanced node sizes. “We see the ramping up of many wafer fabs worldwide generating high demand, and our goal is to keep up with these requirements by providing flexible, reliable, and effective solutions,” Emberger adds.

The new nine megahertz nozzle is only one part of the innovation story. SONOSYS has also launched an advanced digital controller, replacing the former analog system. The new digital controller supports higher frequency operations and includes Ethernet connectivity for seamless integration into modern control systems.

Its patent-pending integrated dry run detection feature automatically prevents the nozzle from being powered up when there is no medium flow. This safeguards the sensitive piezoelectric ceramic within the nozzle, a common vulnerability in traditional systems that often leads to costly replacements or downtime. By eliminating the need for external flow switches, the digital controller, which is compatible with existing nozzles, allows for easy upgrades and reduces maintenance costs.

Industry Impact and Success Stories

The combination of the nine megahertz nozzle and digital controller is already making waves in the industry. These innovations enable SONOSYS to address even the most fragile structures and the smallest particle sizes with precision and reliability, giving clients a significant edge in meeting stringent quality standards.
A standout project from last year involved a customer in Asia whose end market is in the United States. The customer required 18 large submersible transducer systems to be UL-certified and delivered on a strict timeline. The systems were intended to be integrated into wet benches as part of a larger tool to support a new production and cleaning process for a prominent semiconductor manufacturer. The shipment of the 18 systems helped its client develop new production and cleaning processes for tomorrow’s production and cleaning setups. This story is a testament to its ability to deliver complex solutions on a large scale while maintaining high-quality standards.

SONOSYS’s deep focus on customer-centric solutions differentiates it in a competitive landscape. While many companies offer standardized products, SONOSYS is willing to customize everything from nozzle configurations and power levels to the very housings of its products.

Moreover, SONOSYS systems are known for their robustness and maintenance-free operation. Competitors often require piezo ceramic replacements at regular intervals, but SONOSYS products are designed to run continuously without such maintenance. Usually, its systems operate 24/7 for many years without additional maintenance, minimizing downtime and maximizing productivity.

Shaping the Future of Semiconductor Cleaning

SONOSYS’s journey of innovation is far from over. With several development projects currently in progress, the company aims to stay ahead of market trends and continue delivering value to its customers. One such project involves transferring the new digital controller technology to other product lines, ensuring the entire SONOSYS portfolio benefits from this breakthrough.

Staying attuned to customer needs, SONOSYS consistently pushes the boundaries of megasonic technology while remaining true to our core values of reliability, flexibility, and customer-centricity. As the company continues to evolve and expand its capabilities, it remains poised to shape the future of semiconductor cleaning technology for years to come.