SCREEN SPE Germany GmbH
Balancing Innovation and Sustainability in Semiconductor Manufacturing

Facing the dual forces of swift technological progress and pressing environmental demands, SCREEN Semiconductor Solutions Co., Ltd. (SCREEN SPE), a leading semiconductor equipment manufacturer, is actively shaping the future of the industry. Specializing in equipment for wet cleaning/etching, lithography coat/develop, thermal annealing, and metrology, SCREEN SPE is not just keeping up with industry trends—it’s setting them and reshaping semiconductor manufacturing worldwide.

Established in Japan and now a formidable presence on the global stage, the company navigates the complex landscape of volatility, uncertainty, complexity and ambiguity (VUCA) with confidence and skill. It has built a strong reputation for reliability and efficiency, tackling the industry’s toughest challenges with both expertise and innovation.

“Our clients are our best ambassadors of the reliability and efficiency of our equipment, and their satisfaction with our equipment and our customer service is confirmed by consistent, high-quality scores and renewed trust,” says Dr. Martin Hollfelder, VP Service IQ & Technology.

Adapting and Thriving

One of the primary challenges is the demand for continuous innovation spurred by the rapid pace of digital transformation. SCREEN SPE meets this demand head-on with state-of-the-art surface processing technologies refined over decades. These advanced technologies enhance productivity and reduce operational costs, enabling customers to adapt quickly to industry changes.

Parallel to technological advancements, SCREEN SPE is deeply committed to environmental sustainability. The push for greener policies in the industry has spurred SCREEN SPE to develop products that reduce chemical use, conserve energy, and minimize environmental footprints, helping clients adhere to strict environmental regulations without compromising performance.

Another critical challenge is the demographic shift that is causing a talent shortage known as the "War for Talent." The declining working-age population in developed countries has made it difficult for companies to find and retain skilled workers. SCREEN SPE addresses this issue by developing tools that save manpower and working time, featuring user-friendly interfaces that simplify operations. Of particular importance is its Munich training center, which supports ongoing training and skill advancement for employees and customers, contributing to a workforce of high expertise.

While aiding clients in surmounting industry challenges is vital, SCREEN SPE prioritizes its research and development (R&D) efforts equally. The company collaborates with some of the most advanced global centers for microelectronics research, including imec in Belgium and CEA-Leti in France.

It has partnered with imec since 2001, where it provides on-site cleaning and lithography solutions. At CEA-Leti, SCREEN SPE has been contributing lithography coater/developer tracks since 2008 and has offered nanosecond laser annealing services since 2018.

In addition, its dedicated team for process modeling, molecular dynamics, multi-physics, and computational fluid dynamics simulations accelerates technology development. Collaborations with outstanding institutions provide access to supercomputers, further enhancing its R&D capabilities.

Cutting-Edge Products for Modern Semiconductor Challenges

SCREEN SPE offers a diverse and advanced portfolio of customer-centric products designed to meet the needs of various semiconductor manufacturing applications, including wet etch and clean, lithography, annealing, and metrology.

Within the wet etch and clean sector, SCREEN SPE has carved a niche with its flagship model, the SU-3400. Known for its robust performance, the SU-3400 processes up to 1,200 wafers per hour while demonstrating a 30 percent smaller footprint and a 20 percent reduction in environmental impact. This model enhances space efficiency and integrates advanced technologies such as big data analytics and camera surveillance to optimize operations and preempt disruptions.

As part of its lithography advancements, SCREEN SPE recently unveiled the RF-200EX and RF-300EX coaters and developers, crafted for next-generation power and automotive devices. The RF-200EX is optimized for 200mm wafers and features a compact design that enhances productivity while reducing chemical consumption, particle contamination, and defects. It is compatible with the DUV process and offers improved maintainability to minimize downtime. The RF-300EX handles 300mm wafers and includes specialized wafer transfer and holding mechanisms that ensure precise coating and development without damaging thin wafers. Both models offer flexible chemical handling systems that adapt to various chemical types and viscosities, further improving processing performance.

In metrology, SCREEN SPE’s ZI-2000/3500/3600 wafer inspection platforms are widely recognized for their high productivity and cost-effectiveness. These systems are used extensively by clients across Europe and have been enhanced through close collaboration with key customers. The collaboration has led to the integration of advanced inspection hardware and software solutions, significantly boosting productivity and expanding the capabilities of the inspection process, including Electrical Wafer Sort (EWS) operations.

Achievements in Efficiency and Sustainability

Various client success stories highlight the significant impact of the company’s inventive solutions. For instance, at one of its largest clients' U.S. factories, SCREEN SPE implemented a project to reclaim ozonated water on SCREEN wet tools. It maintained process performance while enhancing efficiency by developing a new unit to recover unused ozonated UPW from the tool and recycle it back to the ozone generator.

SCREEN SPE also optimized the use of sulfuric and hydrogen peroxide by reusing SPM on a single wafer tool, achieving equivalent process results to a single-pass dispense but with a 70 percent reduction in chemical consumption. This led to a notable decrease in water, chemical and energy usage, all while sustaining or improving production performance.

Milestones such as this have earned it numerous awards. In 2023, SCREEN SPE was honored from the Semiconductor of the Year for its inspection device, the ZI-3600, recognized in the semiconductor manufacturing equipment category with the "Excellence Award."

In 2024, SCREEN SPE received the prestigious "Nikkei Excellent Products and Services Awards" for its SU-3400, presented by the Nikkei Business Daily.

The same year, it further solidified its reputation by winning the "Okochi Memorial Production Prize" at the 70th Okochi Awards in Japan.

This accolade celebrates significant industrial achievements in production technology and highlights SCREEN SPE's outstanding contributions in invention, design and advanced production methods within the field of production engineering.

Driving Global Sustainability in the Semiconductor Industry

“Our corporate philosophy and core vision is to create innovation for a sustainable world,” says Hollfelder. “We want to create shared value that is beneficial at the economic and social levels.”

SCREEN SPE is at the forefront of advocating for and contributing to the sustainable development of the global semiconductor sector. As a proactive founding member of the Semiconductor Climate Consortium, initiated by SEMI, SCREEN SPE engages in crucial projects such as imec’s SSTS research and European endeavors to curtail and substitute PFAS chemicals within the industry. Its Zeroboard cloud service helps calculate and visualize greenhouse gas emissions, supporting corporate sustainability efforts.

SCREEN SPE’s commitment to sustainability extends to its manufacturing processes. The company’s main production site in Hikone, Japan, operates under safety, smart and speed principles, collectively known as S³ . Recent expansions, including the construction of the S³-4 and S³-5 plants, have incorporated advanced processes such as automatic transfer systems, earthquake resistance, AGV transport systems, and autonomous overhead conveyor systems. These initiatives have significantly improved safety and enhanced overall manufacturing efficiency. By introducing energy-saving clean room air-conditioning equipment, SCREEN SPE will reduce the air-conditioning power consumption in the site by 20 percent. To mitigate supply chain risks, SCREEN SPE recently acquired Phoenix Seiko Co., Ltd., a polymer supplier in Hikone. This acquisition enhances the performance of PVC products used in semiconductor production equipment, improving productivity and shortening lead times.

Driving advancements like these is SCREEN SPE's dedicated workforce. The company fosters an environment that supports professional and personal growth, ensuring that every employee has the opportunity to become a solution creator. Various HR initiatives promote diversity, work-life balance, and employee engagement. The SCREEN Value Award program encourages employees to propose new ideas and solutions, reflecting the company’s dedication to continuous improvement and innovation.

SCREEN SPE welcomes the EU Chips Act and related initiatives aimed at improving semiconductor manufacturing in Europe. With a strong presence in key European countries, it is well-positioned to support new fabs and contribute to the region’s industrial growth. The company’s established relationships with leading semiconductor manufacturers ensure that it remains at the forefront of this exciting development.

From its roots in Kyoto to its status as a global leader in semiconductor solutions, SCREEN SPE’s story is one of relentless dedication to innovation, sustainability and customer satisfaction. As the industry evolves, SCREEN SPE continues to chart a path toward a brighter, more sustainable future.