SCREEN Semiconductor Solution Co., Ltd
Transcending Beyond Equipment and Processes

The fast evolution of advanced devices in the semiconductor manufacturing sector distinguishes SCREEN SPE due to its steadfast dedication to innovation, sustainability, and customer focus. Specializing in technology and equipment solutions for both cutting-edge technology nodes and IoT applications, the company is strategically poised to surpass client expectations and set new industry standards.

SCREEN offers technology and equipment for multiple applications, including coating and development of lithographic materials, wet cleaning, wet etching, annealing, and wafer inspection and metrology.

“Our success stems from an unparalleled dedication to client satisfaction, driven by an increasing demand for equipment from customers,” says Dr. Okuno Yasutoshi, Executive Officer at SCREEN Holdings Co., Ltd. The firm proactively expands its manufacturing capabilities to ensure that its commitment translates into tangible results.

In January 2023, SCREEN inaugurated its fourth state-of-the-art manufacturing factory S3-4 at the Hikone plant, reflecting the firm’s readiness to expand and adapt to the evolving market needs. In addition, a new factory S3-5 is currently under construction, with its commencement of operations scheduled for early 2024.

“While technological innovations and manufacturing capacity are paramount, our intangible value proposition is built on engineering resilience, problem-solving and building customer trust,” says Dr Okuno.

As part of this engagement, SCREEN aggressively addresses the labour shortage that is prevalent in the semiconductor industry. It has established a new Global Training Centre, in Kumamoto, Japan, which is strategically located to leverage the firm’s expertise in equipment setup, maintenance and modification developed over several years.

SCREEN intends to use this facility to train field service engineers, who will then be deployed globally to provide product maintenance training, set up the firm's products and assist customers in their operations. The firm has also expanded the Munich Refurbishment Centre (MRC) in Munich by adding a training facility for customers and employers based in Europe.

Elevating Semiconductor Equipment: Innovation and Excellence

In addition to focusing on 300 mm equipment, and in response to the unique complexities of legacy and mature node devices, SCREEN continually develops its Frontier Project product line. This portfolio includes tools for various applications, ranging from 4 to 12 inch wafers while supporting smaller-diameter wafers within the IoT domain to align with market needs.

The Frontier Project product line offers solutions for thin Si wafers and various materials like sapphire, gallium nitride (GaN), silicon carbide (SiC), lithium tantalate (LiTa), lithium niobate (LiNb) and aluminum titanium carbide (AlTiC).

Among the firm’s accomplishments is the ZI-3600 automated inspection tool designed for next-generation power devices. It functions at double the speed due to its proprietary inspection head and high-speed image processing engine. The tool detects microscopic defects of 1μm or less through three interchangeable lenses while viewing wafer images. This achievement earned the company “the Excellent Award” at the Semiconductor of the Year 2023 in the manufacturing equipment category.

Sustainability at the Core of Operations

SCREEN is spearheaded by a dedicated task force that prioritises sustainability initiatives in semiconductor equipment manufacturing. These efforts have yielded significant improvements in water usage, chemical waste treatment, and environmental responsibility during the manufacturing and utilisation of SCREEN’S products.

A notable example of the firm’s commitment to sustainability includes the introduction of “eco-friendly” equipment like the SU-3400, a flagship single-wafer treatment tool that solidifies its dedication to making the semiconductor industry sustainable.

The SU-3400 inherits the “SU Series” cleaning excellence, with an industry-leading throughput of up to 1,200 wafers per hour. The tool’s design prioritises environmental awareness by reducing exhaust emissions, DIW, chemicals and nitrogen-related challenges while increasing productivity and reducing the environmental impact by 20 per cent.

The tool also features advanced capabilities, including high-resolution chamber video surveillance and IoT driven malfunction detection, to enhance its stability and maintenance, reaffirming its position as a top single wafer cleaning solution. The firm's role as a founder in the Semiconductor Climate Consortium, promoted by SEMI, an industry association, addresses the increasing carbon footprint of global electronics manufacturing companies. In addition, the firm is involved in the sustainable semiconductor technology and system (SSTS) program that is initiated by the Interuniversity Microelectronics Centre (imec).

Navigating the Collaborative Journey: Charting the Road Ahead

SCREEN caters to a diverse clientele, ranging from pathfinding to technology development teams and high volume manufacturing entities. These require a ‘personalised’ technology and process development approach.

SCREEN's collaboration with renowned research institutions such as imec, and IBM provides a comprehensive understanding of industry trends and enables it to develop new capabilities.

To ensure an early alignment with future roadmaps and new product pipelines, Latest SCREEN automated full wafer inspection tool (ZI-3600) SCREEN actively promotes joint development initiatives with customers at its Process Technology Centre (PTC) in Hikone, Japan. The site hosts 2,688 m2 of cleanroom space that is equipped with an impressive line of process and metrology equipment.

Further, technology development and integration efforts are carried out at customer sites.

“We listen to the voice of each customer, and we implement continuous improvement projects (CIP) to modify our equipment based on their specific needs,” highlights Dr Okuno.

In high-volume manufacturing (HVM) scenarios, the firm constantly communicates with the customers to ensure statistical process control for flawless operations.

“Customers’ problems are our problems, and we don’t give up on any problem until it is solved,” adds Dr Okuno.

For example, the constant search for ways to reduce chemical and DIW consumption.

“Switching from one-pass processes to recirculation, especially in terms of formulated chemistry, represents a consistent cost-saving for our customer,” says Dr Okuno.

Core Values Paving the Path to Success

SCREEN demonstrates a steadfast commitment to its six core values, which form the foundation of its customer-centric approach and contribution to business success. Customer orientation is paramount, as the firm intends to surpass customer expectations to foster a long-lasting relationship. Every team member takes personal responsibility for fulfilling their commitments, as the firm values commitment and accountability. It also encourages ownership, empowering individuals to proactively drive progress.

The firm prioritises quality, with ongoing efforts to improve work quality and ensure excellence in every endeavour. Innovation plays a central role, driving the pursuit of new value and customer satisfaction while pushing the boundaries to achieve the extraordinary. SCREEN also strives to create a great workplace that fosters professional and personal growth in an enjoyable environment.

SCREEN further emphasises intangible assets, as exemplified by its yearly patent accumulation. This robust portfolio showcases the company's dedication to innovation and strengthens its client relationships. Its commitment to sustainability extends beyond product development by embracing green manufacturing practices and alternative energy sources.

The convergence of tangible advancements, intangible values and collaborative partnerships places the firm at the forefront of semiconductor equipment manufacturers. In an ever-evolving industry, SCREEN's journey of excellence will continue to shape new paths forward.