Park Systems
Providing Cutting-Edge AFM Solutions

Park Systems, a pioneering manufacturer of Atomic Force Microscopes (AFMs), offers comprehensive solutions for a broad spectrum of applications in the semiconductor industry.

With its extensive experience, Park Systems caters to the diverse needs of customers across various fields. In the realm of research, the company’s specialized AFM products excel in advanced materials, physics, chemistry, and life sciences. For the industrial sector, it provides various metrology instruments for pre- and post-semiconductor processes, as well as automation equipment tailored to the requirements of the display and energy industries.

In a recent development, Park Systems has broadened its scope to include optical measurement methods such as WLI, IR, and ellipsometry in conjunction with AFM technology to offer comprehensive solutions to customers.

“The field of nanometrology benefits significantly from the utilization of AFM, enabling a wide array of measurement parameters and facilitating the broadest range of applications among all metrology techniques,” says Jessica Kang, VP of global marketing at Park Systems.

“This versatility allows us to address numerous use cases, including ultra-fine roughness measurement of various surfaces, precise 3D characterization of semiconductor patterns, defect review and inspection, measurement of dishing and erosion in CMP processes, evaluation of photoresist e-beam damage, metrology for wafer-to-chip bonding, characterization of electrical properties in chips, and mask defect repair, among others.”

Park Systems’ dedication to providing cutting-edge AFM solutions has garnered recognition and gratitude from researchers in academia. Many have expressed their appreciation by utilizing the company’s advanced AFMs to publish exceptional papers in renowned scientific journals such as Science and Nature. Using the AFMs, Park Systems has successfully identified the root cause of defects in end-products that had previously evaded detection, potentially saving companies billions of dollars in claims. It has also enhanced data reliability by verifying the accuracy of measurements obtained from other instruments that lacked adequate verification methods.

“At Park Systems, our commitment to innovation and customer satisfaction drives us to continually push the boundaries of AFM technology,” says Kang.

Park Systems invests significant resources in research and development to stay at the forefront of scientific advancements. By collaborating closely with customers, the company gains valuable insights into their evolving needs, enabling it to design solutions that address the specific challenges in their respective fields.

As the demand for precise characterization and analysis grows, Park Systems remains dedicated to providing state-of-the-art AFM solutions and expanding its capabilities to meet evolving customer requirements. With its expertise in atomic force microscopy, combined with a wide range of measurement techniques, the company is confident in its ability to deliver unrivaled results for researchers and industry professionals alike.