Efficient water management is a central challenge for the semiconductor industry, which is highly water-intensive, e.g. an average facility consuming up to 40 million liters of ultrapure water (UPW) per day [1]. This high demand for water is driven by the intensive cleaning processes required for semiconductor manufacturing, which have increased significantly due to continued device scaling. As global water scarcity becomes a pressing issue, optimizing water usage is essential to mitigate environmental impact, ensure sustainability, and maintain operational continuity.
SCREEN Semiconductor Solutions Co., Ltd. (SCREEN SPE) is the world’s leading provider of wet clean and etch processing equipment to the semiconductor industry. The manufacturing facility for SCREEN SPE is located in Hikone, Japan, and the water source for the facility is Lake Biwa, which is Japan's largest freshwater lake. Lake Biwa holds significant importance for Hikone and the surrounding communities in Shiga Prefecture. The lake supports a diverse ecosystem, providing habitat for numerous plant and animal species. Its clean waters are home to various fish and attract migratory birds, making it a vital spot for biodiversity.
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SCREEN SPE has embraced digital twin technology to enhance its water management practices, demonstrating a commitment to environmental stewardship and operational excellence [2,3]. A digital twin is a virtual replica of physical assets, processes, or systems that enables simulation, and optimization. By integrating data from various sources, digital twins provide actionable insights, facilitating informed decision-making and predictive maintenance.
SCREEN SPE has implemented the Water Management Application (WMA) developed by FTD Solutions [4] at its Hikone Site. This initiative aims to visualize and optimize water usage, reduce environmental impact, and promote sustainability. The WMA provides a comprehensive visual representation of water flow, usage, and waste within the semiconductor manufacturing process, enabling SCREEN SPE to identify inefficiencies and areas for improvement. By leveraging data from sensors and flow monitors, SCREEN SPE can make informed decisions to optimize water management strategies, including adjusting water usage, recycling, and reclaiming processes to minimize waste and conserve resources.
The digital twin technology supports validated water conservation accounting and performance tracking, aligned with industry standards. Automated reports facilitate innovation and sustainability reporting, ensuring transparency and accountability. Additionally, the digital twin enables future risk identification by simulating various scenarios and forecasting potential issues. This proactive approach helps prevent disruptions and enhances operational continuity.
SCREEN SPE's collaboration with FTD Solutions has led to the development of a baseline water model and the calibration of water conservation KPIs. These efforts support strategic planning for future sustainability activities and infrastructure development. SCREEN SPE's Hikone Site serves as a model for the successful implementation of digital twin technology. The initial assessment of the WMA has provided valuable insights into water demand, conservation, and facility-level impact. As a result of the Phase 2 collaboration with FTD Solutions, a strategic plan to significantly reduce water intake at the Hikone site has been identified. Moving forward, SCREEN SPE plans to expand the WMA to other facilities, establish water management standards, and develop water models that anticipate future sustainability activities.
The integration of digital twin technology by SCREEN SPE exemplifies the transformative potential of innovative solutions in achieving sustainability goals. By optimizing water management practices, SCREEN SPE not only reduces its environmental footprint but also sets a benchmark for the semiconductor industry. Through continued efforts and strategic collaborations, SCREEN SPE is paving the way for a sustainable future.