Nanomotion
Using Multi-beam Writing to Make Nanofabricated Chips

Nanomotion specializes in designing and manufacturing complete motion solutions using its proprietary ceramic servo motor technology. Unlike traditional electromagnetic motors, Nanomotion’s motors are based on piezoelectric ceramic materials, which offer many advantages, including faster response times, ultrahigh position stability, and lower heat generation. This allows Nanomotion to provide high-speed and precise single and multi-axis motion systems in a compact and lightweight design, which is a key advantage for its customers.

What makes Nanomotion unique in the space is the use of its technology in multi-beam writing for mask generation to help tool builders achieve smaller nodes and higher line density. As the demand for higher performance microchips is increasing, line density is getting smaller, and the need for higher precision and position stability is growing. This is where Nanomotion’s motion systems are enabling multi-beam mask writing technology to create complex structures of high quality and resolution in less time. But to achieve high accuracy and uniform motion in mask writing, chip makers and tool builders need a motion system that can move things really precisely – to one nanometer and below.

“We are well-equipped to provide a motion platform to tool builders that will enable them to reach their desired nanometer level,” states Alan Feinstein, president and VP of Sales and Marketing, Nanomotion.
Besides multi-beam mask writing, motion requirements in circuit edit is equally crucial to meet the semiconductor industry’s needs. Circuit editing is a process used to modify circuits on a wafer during inspection to ensure they work as intended. This process is precise, down to the subnanometer level.

With its advanced technologies and expertise, Nanomotion is producing precision motion systems capable of supporting mask and wafer production with higher accuracy than many other firms. The high-quality motion solutions it offers are customized to meet not only current but even future market demands. Nanomotion’s compact positioning systems provide accurate and precise movement, high resolution, and a low settling time, coupled with a wide dynamic range of velocity and force, making them ideal for many applications.

Piezoelectric-Powered Motion Systems for Minichips

Nanomotion has developed a range of ultrasonic motors that utilize piezoelectric principles. Unlike traditional motors, these ultrasonic motors have no moving parts or magnetic fields, which makes them ideal for use in applications that require a high degree of precision and reliability. In addition, Nanomotion’s expertise in developing application-specific systems allows them to provide tailored solutions that meet the unique needs of each customer. With its ultrasonic motors, Nanomotion is able to offer a wide range of high-performance motion solutions for various industries, including semiconductor manufacturing, medical device manufacturing, and aerospace engineering.

Nanomotion’s motion systems are also designed to take into account environmental factors such as temperature and vibrations. With stringent tolerances for temperature and humidity, these systems can be integrated with environmental control units to stabilize vibrations and compensate for temperature variations.
Another competitive advantage of Nanomotion is that it produces and designs motion systems with a single drive mechanism and feedback loop, resulting in faster and more precise performance while also simplifying the positioning process. For instance, Nanomotion’s motors are capable of driving systems at speeds of up to 500 millimeters per second and achieving a positioning accuracy of 1 nm.

Applications of Piezoelectric Motors

Nanomotion’s capabilities were recently showcased through a collaboration with a semiconductor tool builder. The customer required a motion solution that could work at the sub-nanometer level, specifically to align and calibrate their e-beam column. Nanomotion was able to provide a solution using its motion technology that could align and calibrate the e-beam at 0.7 nanometers. The team at Nanomotion worked closely with the customer to design a specific three-axis system that moved in X, Y, and Z, and incorporated their preferred controller to ensure compatibility with their existing processes. The product was designed with strict guidelines and material constraints to ensure the customer’s needs were met. The use of Nanomotion’s technology not only allowed the customer to achieve the customer’s goals but also maintained a clean environment with zero organic contaminants.

Delivering High-quality Service

Nanomotion’s piezoelectric motors are integral to the semiconductor processes that utilize electron or ion beams. Its exceptional products and capabilities bridge the gap in meeting the next generation of semiconductor performance requirements.
This feat is made possible by its team of experts who hold decades of experience in motion solutions and their applications. They leverage their vast knowledge to optimize motor and system performance, enabling Nanomotion to deliver solutions that meet the evolving needs of the semiconductor industry.

Nanomotion is dedicated to expanding its reach and reputation by delivering better performance, higher reliability, and greater durability to its customers. W i t h a global presence and a broad customer base in the U.S., Europe, the Middle East, and the Far East, Nanomotion has invested in new, larger cleanrooms that can measure the cleanliness and vibration isolation required to achieve sub-nanometer level precision. This investment has enabled Nanomotion to continue meeting the evolving needs of its customers and driving innovation in the field of motion solutions.