Innovations in Optics, Inc.
Pioneers in High-Powered LED Technology

Within the realm of semiconductor manufacturing, illumination by light-emitting diodes (LEDs) has emerged as a more efficient and superior alternative to conventional light sources, such as arc lamps and lasers. LEDs offer higher power, longer lifetimes, more spectral options (UV-VIS-NIR) and control, and lower energy consumption. While commercially available LED packages work adequately for some applications, demanding requirements in scientific and industrial arenas necessitate optimized illuminators that outperform them in terms of output power, manufacturability, cost, and reliability. For the past 30 years, Innovations in Optics (IOI) has been pushing design boundaries and developing innovative high-power LED illumination systems that provide maximum photon delivery, illumination uniformity, and stable optical power. From maskless lithography to direct imaging and inspection, IOI LED systems are illuminating numerous new applications with their superior designs.

Founded by Dr. Thomas J Brukilacchio (Optics) and Sarah Harpley Brukilacchio (Manufacturing Engineer), IOI has encountered and resolved many complex challenges faced by customers in the semiconductor industry. Today, consumers seek high-power solutions that deliver efficiency and affordability while ensuring long-lasting performance. They are burdened by the high cost of arc lamps and lasers, as well as the complexity of integrating and customizing them.

"IOI LED illuminators are the light sources of the future. They have a longer service life, require no warmup or cool down, and they are more energy efficient and environmentally friendly," says Dr. Brukilacchio.

IOI's LED light engines not only provide superior performance over traditional light sources but also eliminate the need for additional components like shutters or bandpass filters. This allows for quick switching between multiple wavelengths and a more compact design. IOI's proprietary technology also enables tailored spectral output to meet specific client needs. Additionally, IOI places great emphasis on thermal management to ensure the longevity of its LED die. It designs custom boards with proprietary cooling technology and performs in-house die attachment and wire bonding to keep the die junction temperature low, which is critical for maintaining the LED's lifespan. IOI also designs constant current, high-power digital drivers and controllers specifically for LEDs. These systems monitor and control individual LED die, manage board temperature, and ensure stable spectral output with minimal fluctuations in intensity (e.g. < 0.3 percent long term instability of irradiance). New IOI board designs that manage thermal issues, along with IOI patented light recycling and new die, enable IOI to break etendue barriers and offer the highest possible UV powers and uniformity for the semiconductor industry.

As LED technology advances and a wider range of wavelengths becomes available, IOI stays apprised of the latest developments in LED die offerings and can extract power even from low-performance LEDs.

With decades of experience, the company has developed unique methods for attaching and wire bonding LED die in close-packed arrays, as well as Chip on Board (COB) designs that can accommodate single and multiwavelength options from ultraviolet (UV) to infrared (IR). IOI's light sources can contain anywhere from one to thousands of LED optics and design expertise ensure high uniformity and output, even for systems with multiple wavelengths. This expertise in designing high-performance light sources has enabled IOI to create a wide range of LED products, including the LumiDLTM UV LED Digital Micromirror Device (DMD) Illuminator, which is optimized for the Texas Instruments Digital Light Processing (DLP) chipsets. Its modular Field Replaceable Unit (FRU) design enables quick and efficient replacement, minimizing downtime. The FRU can be customized to handle various photoresists with single or multi-wavelength options. The latest version of the LumiDLTM UV LED DMD illuminator offers even higher radiant power, supporting unprecedented speed and resolution in 3D printing and direct image writing.
IOI produces numerous light engines for OEM customers across various markets, such as solar, industrial, medical, and bio-instrumentation, and takes pride in providing customers with state-of-the-art solutions that offer significant profitability and market advantage. For these demanding end-use applications, IOI manufactures ‘copy exact’ quality products in high volumes. Notably, IOI was awarded an “Excellent” Quality System Audit Rating by one of the top 10 medical technology companies in the world. The LumiDLTM for photolithography in the semiconductor industry has achieved significant success with an install base of over 2000 worldwide, and with the launch of the higher power version, IOI expects to ignite excitement in the market.

IOI has recently established a foothold in the semiconductor inspection field by offering an innovative solid-state lighting solution based on its award-winning LumiSpectra.TM This groundbreaking technology not only enables its customers to outpace their competitors but also results in significant cost savings. Customers recognize the potential of this multispectral module as the LED source of the future to replace Tungsten Haolgen and arc lamps. To meet market needs, IOI provides a continuous broadband spectrum tailored to customers’ specifications, offering a stable and long-lasting solution that eliminates frequent calibrations and expensive maintenance required for standard lamps. The multispectral module is customizable, allowing for the adjustment of output power and the shaping of the spectrum. Using this technology, IOI's customers have experienced significant productivity improvements, reduced CO2 emissions, and increased electrical efficiency, making it an environmentally friendly solution.

IOI's unwavering dedication to engineering excellence is reflected in its impressive number of patents and customercentric approach. Its strategic investments in automatic die and wire bonders, and International Organization for Standardization (ISO) Class 7 cleanroom are geared toward expanding their product offerings and pioneering the next generation of Photonics. Automation and other investments have resulted in increased efficiency and precision, supporting the intricacy of die arrays unique to IOI. With innovative LED systems and thermal management designs, IOI's UV LED DMD illuminators are poised to achieve powers in excess of 50W for multiple wavelength configurations, benefiting the semiconductor industry with higher throughput and longer lifetime.