EcoSys Pte Ltd
The Environmental Protection System Specialist

Established in 2005, EcoSys Pte Ltd has evolved into a premier system solutions provider with a remarkable 16-year legacy in environmental protection systems. The company specializes in abatement solutions for semiconductor wafer fabs. Its products, including Marathon, Guardian, CDO, and Vector, deliver abatement efficiencies exceeding 99 percent on all gas species, including PFCs and greenhouse gases.

“At EcoSys, we are not just a leading industrial system provider; we are a trusted partner committed to offering efficient solutions with a central focus on providing our clients with unparalleled peace of mind,” says Mr. Chan Chee Wei, the CEO of EcoSys.

What truly sets EcoSys apart is its unwavering commitment to a customer-centric approach. The company transcends conventional solutions by actively collaborating with clients, leveraging its strong R&D team and frontier technologies such as microwave plasma usage with low power consumption. This dedication allows EcoSys to customize machines and develop effective, tailored solutions for every unique challenge. Its adaptability, fueled by cutting-edge technology, makes EcoSys a versatile and reliable partner, reinforcing the commitment to providing Net zero solutions for a sustainable future.

Further, EcoSys prides itself on a team possessing diverse and specialized expertise, contributing significantly to the unique value we provide in the market. Its team’s competencies span several key areas, enhancing the company’s ability to deliver innovative and effective solutions tailored to the specific needs of clients.

The team includes experts in abatement technologies, with in-depth knowledge of gas treatment processes in semiconductor wafer fabs.Skilled process engineers within the team understand the intricacies of various fab modules and process types.This expertise enables EcoSys to offer customized solutions, seamlessly integrating with and optimizing the performance of each client’s unique processes.

As a result, EcoSys excels in achieving high abatement efficiencies, including PFCs, through its groundbreaking microwave energy method. The company ingeniously utilizes high-frequency microwaves to activate a plasma gas, generating high kinetic energy electrons. This dynamic process effectively breaks molecular bonds effectively, ensuring environmentally responsible disposal.

EcoSys is proud to affirm its unwavering commitment, going beyond, to following IPCC requirements and adhering to regulations and standards in the environmental protection system. Its dedication to environmental responsibility is reflected in the adherence to industryspecific codes and standards, including Semi S2, Semi F47, EN ISO121000:2010, Council Directive 2006/42/EC, Annex I, and EN 60204-33:2011. This commitment ensures that EcoSys’ products not only meet but exceed the highest industry benchmarks for environmental compliance.

With nearly 10,000 machines delivered and counting, EcoSys has garnered exceptional feedback from its clients. The positive testimonials highlight the company’s commitment to teamwork, outstanding after-sales service, and the efficacy of solutions in meeting and exceeding client expectations.

EcoSys envisions a future where environmental protection solutions play a crucial role in sustainable industry practices. The company’s commitment extends beyond growth; it aims to be a catalyst for positive change, contributing to a greener world. While specific details are under wraps, EcoSys is actively developing innovative solutions, including our revolutionary “Piece of Mind Abatement.” This not only addresses current challenges but assures clients of efficient and reliable abatement, providing unparalleled peace of mind. Furthermore, EcoSys’ commitment extends to delivering the “Best CoO” (Cost of Ownership) in the industry, ensuring not only cutting-edge technology but also cost-effective, sustainable solutions. The company aims to redefine industry standards with holistic, forward-looking environmental solutions.